Strataglass - CVD Thin Films - Our Services

Thin Film Properties

PECVD Film Properties	Insulating	Diffusion Barrier	Wet Etch BOE	Plasma Etch	Bulk Stress	Scratch Protection	Hydrogen Inclusion	Thermal Stability
PECVD Silicon Nitride	Good	Very Good	Very Slow	Moderate	Moderately Compressive	Very Good	Moderate	Good
PECVD Oxide	Very Good	Moderate	Fast	Moderate	Mildly Compressive	Good	Moderate	Good
PECVD Oxynitride 50X	Variable	Variable	Variable	Moderate	Variable	Good	Moderate	Good
PECVD Oxynitride 90X	Variable	Variable	Variable	Moderate	Variable	Good	Moderate	Good
LPCVD Film Properties	Insulating	Diffusion Barrier	Wet Etch BOE	Plasma Etch	Bulk Stress	Scratch Protection	Hydrogen Inclusion	Thermal Stability
LPCVD Silicon Nitride	Very Good	Very Good	Very Slow	Moderate	Very Tensile	Very Good	Low	Very Good
LPCVD Low Stress Nitride	Very Good	Very Good	Very Slow	Moderate	Variable	Very Good	Low	Very Good
Polysilicon	Moderate Conductor	--	Very Slow	--	Compressive	--	Low	Very Good
Amorphous Silicon	Moderate Conductor	--	Very Slow	--	Compressive	--	Low	Good
Thermal Oxide	Very Good	Moderate	Fast	Moderate	Compressive	Good	Low	Very Good